Product Features:
The marble base is matched with high-rigidity linear guide rails and high-precision optical grating feedback, which can ensure stable accuracy of product for a long time.
X-axis, Y-axis, C-axis, B-axis, A-axis all are driven by direct drive motor, which can ensure high acceleration and sub-micron precision. X-axis,Y-axis was driven by linear motor, which is built into a two-dimensional cross structure. C-axis, B-axis, A-axis direct drive by DDR, which is built into a swing head structure. Z1-axis, Z2-aixs was driven by servo motor with brake, power-off protection.
X-axis、Y-axis max.speed is 1m/s, the acceleration is 1G, and the repeat positioning accuracy is ±1um.
Rotary axis repeat positioning accuracy ±1.5arcsec.
Parameter：
| Item |
X-axis |
Y-axis |
Z1-axis |
Z2-axis |
C-axis |
B-axis |
A-axis |
| Stroke (mm) |
500 |
300 |
300 |
150 |
100°-+40° |
100°-+40° |
360° |
| Max.Speed (mm/s) |
1000 |
1000 |
500 |
500 |
500rpm |
300rpm |
500rpm |
| Repeat Accuracy (μm) |
±1 |
±1 |
±0.01 |
±0.01 |
±1.5arc sec |
±1.5arc sec |
±1.5arc sec |
| Acceleration（g） |
0.5 |
0.5g |
0.5 |
0.5 |
|
|
|
| Load （kg） |
|
|
30 |
30 |
|
|
|
| Z1-axis and Z2-axis positioning accuracy≤0.01mm; XY-axis perpendicularity≤0.01mm; Z1 & XY axis flat perpendicularity≤0.01mm |
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| Any position in space and theoretical deviation ≤0.04mm |
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Application:
Six-axis motorized linear stage can meet high-speed, high-acceleration, and high-precision
product customization requirements. It can be suitable for glass flake inspection, glass cutting, laser processing (shaped marking), wafer inspection, CCD imaging, three-dimensional profile scanning and other high-end manufacturing industries.
Application scenarios:
It can realize fast and accurate point-to-point operation within six-dimensional range of solid space.
It can be matched with line scan cameras, lasers for flying shooting, flying marking and other processing actions.
Use the six-axis linkage high speed linear stage mode to realize the interpolation movement of any curve within the stroke range.
Hardware configuration:
X/Y axis——high-precision linear stage(with optical grating feedback + linear drive)
A/B/C axis——DDR dc torque motor stage (with optical grating feedback + DDR driver)
Z1/Z2 axis——servo module (servo motor+ servo drive + full closed loop control)
Multi-axis motion controller: (including eight axis pulse output + eight axis analog output)
Limit and origin sensor: equipped with grating limit and grating origin and photoelectric sensor in reserve
Visual system with various application scenarios (optional)
Software configuration:
Gli stadi lineari motorizzati di precisione sono dotati di ciascun asse e di software e istruzioni di debug del controller, varie interfacce di movimento della traiettoria di interpolazione e forniscono compensazione del posizionamento, calibrazione visiva, misurazione di precisione, forniscono formazione di orientamento precoce e servizi di sviluppo assistito e forniscono servizi di sviluppo software.
Compensazione della precisione degli stadi di posizionamento motorizzati:
Errore lineare dell'asse di movimento
Errore di verticalità dell'asse di movimento
Errore di montaggio dell'asse di rotazione nel centro di rotazione
